Nucleation and growth of tantalum nitride atomic layer deposition on Al(2)O(3) using TBTDET and hydrogen radicals Journal Article uri icon

Overview

publication date

  • July 1, 2009

Full Author List

  • Rayner GB; George SM

Other Profiles

Additional Document Info

start page

  • 716

end page

  • 724

volume

  • 27

issue

  • 4