Nucleation and growth of tantalum nitride atomic layer deposition on Al2O3 using TBTDET and hydrogen radicals Journal Article uri icon

Overview

publication date

  • July 1, 2009

has restriction

  • closed

Date in CU Experts

  • September 6, 2013 4:39 AM

Full Author List

  • Rayner GB; George SM

author count

  • 2

citation count

  • 22

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Additional Document Info

start page

  • 716

end page

  • 724

volume

  • 27

issue

  • 4