Temperature-induced apparent mass changes observed during quartz crystal microbalance measurements of atomic layer deposition
Journal Article
Overview
publication date
- October 1, 2003
Full Author List
- Rocklein MN; George SM
published in
- Analytical Chemistry Journal
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 4975
end page
- 4982
volume
- 75
issue
- 19