Smoothing surface roughness using Al2O3 atomic layer deposition Journal Article uri icon

Overview

publication date

  • December 15, 2021

has restriction

  • closed

Date in CU Experts

  • March 5, 2022 2:52 AM

Full Author List

  • Myers TJ; Throckmorton JA; Borrelli RA; O'Sullivan M; Hatwar T; George SM

author count

  • 6

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0169-4332

Electronic International Standard Serial Number (EISSN)

  • 1873-5584

Additional Document Info

volume

  • 569

number

  • ARTN 150878