Thermal atomic layer etching of VO2 using sequential BCl3 and SF4 exposures: Observation of conversion, ligand-exchange, and oxidation state changes Journal Article uri icon

Overview

publication date

  • January 1, 2023

has restriction

  • hybrid

Date in CU Experts

  • January 3, 2023 7:53 AM

Full Author List

  • Gertsch JC; Partridge JL; Cano AM; Clancey JW; Bright VM; George SM

author count

  • 6

citation count

  • 2

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 41

issue

  • 1

number

  • ARTN 012603