Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures Journal Article

Overview

CU Boulder Authors

George, Steven

publication date

November 30, 2023

has restriction

closed

Date in CU Experts

August 30, 2023 12:36 PM

Full Author List

Partridge JL; Abdulagatov AI; Sharma V; Murdzek JA; Cavanagh A; George SM

author count

6

citation count

0

published in

Applied Surface Science Journal

Other Profiles

International Standard Serial Number (ISSN)

0169-4332

Electronic International Standard Serial Number (EISSN)

1873-5584

Digital Object Identifier (DOI)

https://doi.org/10.1016/j.apsusc.2023.157923

Additional Document Info

volume

638

number

ARTN 157923