Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures Journal Article uri icon

Overview

publication date

  • November 30, 2023

has restriction

  • closed

Date in CU Experts

  • August 30, 2023 12:36 PM

Full Author List

  • Partridge JL; Abdulagatov AI; Sharma V; Murdzek JA; Cavanagh A; George SM

author count

  • 6

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0169-4332

Electronic International Standard Serial Number (EISSN)

  • 1873-5584

Additional Document Info

volume

  • 638

number

  • ARTN 157923