Nonlinear Behavior of Decrease in Reflectivity of Multilayer Mirrors for Extreme Ultraviolet Lithography Optics by High-Flux Extreme Ultraviolet Irradiation in Various Vacuum Environments Conference Proceeding uri icon


publication date

  • November 9, 2010

has restriction

  • closed

Date in CU Experts

  • May 22, 2024 8:44 AM

Full Author List

  • Niibe M; Koida K; Kakutani Y; Nakayama T; Terashima S; Miyake A; Kubo H; Matsunari S; Aoki T; Kawata S

author count

  • 10

Other Profiles

International Standard Serial Number (ISSN)

  • 0021-4922

Electronic International Standard Serial Number (EISSN)

  • 1347-4065

Additional Document Info


  • 50


  • 6