Low-temperature etching of silicon oxide and silicon nitride with hydrogen fluoride Journal Article uri icon

Overview

publication date

  • December 1, 2024

has restriction

  • closed

Date in CU Experts

  • December 31, 2024 6:08 AM

Full Author List

  • Lill T; Wang M; Wu D; Oh Y-J; Kim TW; Wilcoxson M; Singh H; Ghodsi V; George SM; Barsukov Y

author count

  • 11

citation count

  • 1

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 42

issue

  • 6

number

  • ARTN 063006