Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching Journal Article uri icon

Overview

publication date

  • December 1, 2024

has restriction

  • closed

Date in CU Experts

  • December 31, 2024 10:44 AM

Full Author List

  • Edel R; Alexander E; Nam T; Cavanagh AS; Van Voorhis T; George SM

author count

  • 6

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 42

issue

  • 6

number

  • ARTN 062602