Film and surface stress during Al2O3 thermal atomic layer etching using in situ wafer curvature measurements Journal Article uri icon

Overview

publication date

  • May 1, 2026

Date in CU Experts

  • April 30, 2026 3:05 AM

Full Author List

  • Vanfleet RB; Bright VM; George SM

author count

  • 3

citation count

  • 0

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 44

issue

  • 3

number

  • ARTN 032605