History of atomic layer deposition and its relationship with the American Vacuum Society Journal Article uri icon

Overview

publication date

  • September 1, 2013

has restriction

  • green

Date in CU Experts

  • November 15, 2013 9:17 AM

Full Author List

  • Parsons GN; Elam JW; George SM; Haukka S; Jeon H; Kessels WMME; Leskela M; Poodt P; Ritala M; Rossnagel SM

author count

  • 10

citation count

  • 76

Other Profiles

International Standard Serial Number (ISSN)

  • 0734-2101

Electronic International Standard Serial Number (EISSN)

  • 1520-8559

Additional Document Info

volume

  • 31

issue

  • 5

number

  • ARTN 050818