History of atomic layer deposition and its relationship with the American Vacuum Society Journal Article uri icon

Overview

publication date

  • September 1, 2013

Full Author List

  • Parsons GN; Elam JW; George SM; Haukka S; Jeon H; Kessels WMME; Leskela M; Poodt P; Ritala M; Rossnagel SM

Other Profiles

Additional Document Info

volume

  • 31

issue

  • 5