ELECTRON-CYCLOTRON-RESONANCE PLASMA-ENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION OF TANTALUM OXIDE THIN-FILMS ON SILICON NEAR ROOM-TEMPERATURE Journal Article uri icon

Overview

publication date

  • June 1, 1995

Full Author List

  • NAGAHORI A; RAJ R

Other Profiles

Additional Document Info

start page

  • 1585

end page

  • 1592

volume

  • 78

issue

  • 6