Fabrication process for ultra high aspect ratio polysilazane-derived MEMS Conference Proceeding uri icon

Overview

publication date

  • January 20, 2002

Date in CU Experts

  • May 28, 2014 3:08 AM

Full Author List

  • Cross T; Liew LA; Bright VM; Dunn ML; Daily JW; Raj R

author count

  • 6

citation count

  • 8

Other Profiles

International Standard Serial Number (ISSN)

  • 1084-6999

International Standard Book Number (ISBN) 10

  • 0-7803-7185-2

Additional Document Info

start page

  • 172

end page

  • 175