Fabrication process for ultra high aspect ratio polysilazane-derived MEMS Conference Proceeding

Overview

CU Boulder Authors

publication date

January 20, 2002

Date in CU Experts

May 28, 2014 3:08 AM

Full Author List

Cross T; Liew LA; Bright VM; Dunn ML; Daily JW; Raj R

author count

6

citation count

8

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2002) Conference

Other Profiles

International Standard Serial Number (ISSN)

1084-6999

Digital Object Identifier (DOI)

10.1109/MEMSYS.2002.984232

International Standard Book Number (ISBN) 10

0-7803-7185-2

Additional Document Info

start page

172

end page

175