Fabrication process for ultra high aspect ratio polysilazane-derived MEMS Conference Proceeding

Overview

CU Boulder Authors

publication date

January 20, 2002

Full Author List

Cross T; Liew LA; Bright VM; Dunn ML; Daily JW; Raj R

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

Other Profiles

Digital Object Identifier (DOI)

10.1109/MEMSYS.2002.984232

Additional Document Info

start page

172

end page

175