Fabrication process for ultra high aspect ratio polysilazane-derived MEMS
Conference Proceeding
Overview
publication date
- January 20, 2002
Full Author List
- Cross T; Liew LA; Bright VM; Dunn ML; Daily JW; Raj R
published in
Other Profiles
Digital Object Identifier (DOI)
Additional Document Info
start page
- 172
end page
- 175