Fabrication of SiCN MEMS structures using microforged molds Conference Proceeding uri icon

Overview

publication date

  • January 21, 2001

Full Author List

  • Liu YP; Liew LA; Luo RL; An LN; Bright VM; Dunn ML; Daily JW; Raj R

Other Profiles

Additional Document Info

start page

  • 118

end page

  • 121