Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor Conference Proceeding

Overview

CU Boulder Authors

publication date

January 21, 2001

has restriction

closed

Date in CU Experts

May 28, 2014 3:08 AM

Full Author List

Liew LA; Luo RL; Liu YP; Zhang WG; An LN; Bright VM; Dunn ML; Daily JW; Raj R

author count

9

citation count

4

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) Conference

Other Profiles

International Standard Serial Number (ISSN)

1084-6999

Digital Object Identifier (DOI)

https://doi.org/10.1109/memsys.2001.906485

International Standard Book Number (ISBN) 10

0-7803-5999-2

Additional Document Info

start page

86

end page

89