Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor Conference Proceeding uri icon


publication date

  • January 21, 2001

Full Author List

  • Liew LA; Luo RL; Liu YP; Zhang WG; An LN; Bright VM; Dunn ML; Daily JW; Raj R

Other Profiles

Additional Document Info

start page

  • 86

end page

  • 89