Fabrication of multi-layered SiCN ceramic MEMS using photo-polymerization of precursor Conference Proceeding uri icon

Overview

publication date

  • January 21, 2001

Date in CU Experts

  • May 28, 2014 3:08 AM

Full Author List

  • Liew LA; Luo RL; Liu YP; Zhang WG; An LN; Bright VM; Dunn ML; Daily JW; Raj R

author count

  • 9

citation count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 1084-6999

International Standard Book Number (ISBN) 10

  • 0-7803-5999-2

Additional Document Info

start page

  • 86

end page

  • 89