Atomic layer deposition of conformal dielectric and protective coatings for released micro-electromechanical devices Conference Proceeding uri icon

Overview

publication date

  • January 20, 2002

Date in CU Experts

  • May 28, 2014 4:03 AM

Full Author List

  • Hoivik N; Elam J; Linderman R; Bright VM; George S; Lee YC

author count

  • 6

citation count

  • 10

Other Profiles

International Standard Serial Number (ISSN)

  • 1084-6999

International Standard Book Number (ISBN) 10

  • 0-7803-7185-2

Additional Document Info

start page

  • 455

end page

  • 458