Atomic layer deposition of conformal dielectric and protective coatings for released micro-electromechanical devices Conference Proceeding uri icon

Overview

publication date

  • January 20, 2002

Full Author List

  • Hoivik N; Elam J; Linderman R; Bright VM; George S; Lee YC

Additional Document Info

start page

  • 455

end page

  • 458