Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors Conference Proceeding

Overview

CU Boulder Authors

publication date

January 25, 2004

Full Author List

Herrmann CF; DelRio FW; Bright VM; George SM

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

Other Profiles

Digital Object Identifier (DOI)

10.1109/MEMS.2004.1290669

Additional Document Info

start page

653

end page

656