Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors Conference Proceeding

Overview

CU Boulder Authors

publication date

January 25, 2004

has restriction

closed

Date in CU Experts

May 28, 2014 4:05 AM

Full Author List

Herrmann CF; DelRio FW; Bright VM; George SM

author count

4

citation count

5

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

17th IEEE International Conference on Micro Electro Mechanical Systems Conference

Other Profiles

International Standard Serial Number (ISSN)

1084-6999

Digital Object Identifier (DOI)

https://doi.org/10.1109/mems.2004.1290669

International Standard Book Number (ISBN) 10

0-7803-8265-X

Additional Document Info

start page

653

end page

656