ATOMIC LAYER DEPOSITION (ALD) TUNGSTEN NANOELECTROMECHANICAL TRANSISTORS Conference Proceeding

Overview

CU Boulder Authors

publication date

January 24, 2010

Full Author List

Davidson BD; George SM; Bright VM

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

Other Profiles

Digital Object Identifier (DOI)

10.1109/MEMSYS.2010.5442474

Additional Document Info

start page

424

end page

427