ATOMIC LAYER DEPOSITION (ALD) TUNGSTEN NANOELECTROMECHANICAL TRANSISTORS Conference Proceeding

Overview

CU Boulder Authors

publication date

January 24, 2010

has restriction

closed

Date in CU Experts

May 28, 2014 4:05 AM

Full Author List

Davidson BD; George SM; Bright VM

author count

3

citation count

3

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

presented at event

23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) Conference

Other Profiles

International Standard Serial Number (ISSN)

1084-6999

Digital Object Identifier (DOI)

https://doi.org/10.1109/memsys.2010.5442474

Additional Document Info

start page

424

end page

427