Effect of Al2O3 ald nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures Conference Proceeding uri icon

Overview

publication date

  • March 30, 2003

has restriction

  • closed

Date in CU Experts

  • May 28, 2014 4:05 AM

Full Author List

  • Gall K; Dunn ML; Hulse M; Finch D; George SM

author count

  • 5

Other Profiles

International Standard Book Number (ISBN) 10

  • 0-7803-7649-8

Additional Document Info

start page

  • 463

end page

  • 472