Effect of Al2O3 ald nanocoatings on the thermo-mechanical behavior of Au/Si MEMS structures Conference Proceeding uri icon

Overview

publication date

  • March 30, 2003

Full Author List

  • Gall K; Dunn ML; Hulse M; Finch D; George SM

Other Profiles

Additional Document Info

start page

  • 463

end page

  • 472