Ultra-thin multilayer nanomembranes for short wavelength deformable optics Conference Proceeding

Overview

CU Boulder Authors

publication date

January 25, 2004

Full Author List

Tripp MK; Herrmann CF; George SM; Bright VM

published in

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Journal

Other Profiles

Digital Object Identifier (DOI)

10.1109/MEMS.2004.1290526

Additional Document Info

start page

77

end page

80