Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide Journal Article uri icon

Overview

publication date

  • January 1, 2014

Full Author List

  • Anderson VR; Cavanagh AS; Abdulagatov AI; Gibbs ZM; George SM

Other Profiles

Additional Document Info

volume

  • 32

issue

  • 1