ATOMIC LAYER DEPOSITION (ALD) TUNGSTEN NEMS DEVICES VIA A NOVEL TOP-DOWN APPROACH Conference Proceeding uri icon

Overview

publication date

  • January 25, 2009

Full Author List

  • Davidson BD; Chang YJ; Seghete D; George SM; Bright VM

Other Profiles

Additional Document Info

start page

  • 120

end page

  • 123