ATOMIC LAYER DEPOSITION (ALD) TUNGSTEN NEMS DEVICES VIA A NOVEL TOP-DOWN APPROACH
Conference Proceeding
Overview
publication date
- January 25, 2009
has restriction
- closed
Date in CU Experts
- October 21, 2014 5:22 AM
Full Author List
- Davidson BD; Chang YJ; Seghete D; George SM; Bright VM
author count
- 5
citation count
- 7
published in
presented at event
Other Profiles
International Standard Serial Number (ISSN)
- 1084-6999
Digital Object Identifier (DOI)
Additional Document Info
start page
- 120
end page
- 123