A model study of capacitive micromachined ultrasonic transducers fabricated using atomic layer deposition process Journal Article uri icon

Overview

publication date

  • January 1, 2004

has subject area

Date in CU Experts

  • January 31, 2017 3:50 AM

Full Author List

  • Liu LL; Mukdadi OM; Hertzberg JR; Shandas R

author count

  • 4

Other Profiles

International Standard Serial Number (ISSN)

  • 1054-0032

Additional Document Info

start page

  • 142

end page

  • 148

volume

  • 449