A model study of capacitive micromachined ultrasonic transducers fabricated using atomic layer deposition process Journal Article uri icon

Overview

publication date

  • January 1, 2004

Full Author List

  • Liu LL; Mukdadi OM; Hertzberg JR; Shandas R

Additional Document Info

start page

  • 142

end page

  • 148

volume

  • 449