High-speed, sub-15 nm feature size thermochemical nanolithography
Journal Article
Overview
publication date
- April 1, 2007
has subject area
- Biomedical and Dental Materials - Membranes, Artificial
- Biomimetic Materials - Membranes, Artificial
- Chemical Phenomena - Crystallization
- Chemistry Techniques, Analytical - Crystallization
- Diagnostic Imaging - Microscopy, Atomic Force
- Ecological and Environmental Phenomena - Hot Temperature
- Ecological and Environmental Phenomena - Hot Temperature
- Environment and Public Health - Hot Temperature
- Environment and Public Health - Hot Temperature
- Investigative Techniques - Microscopy, Atomic Force
- Macromolecular Substances
- Manufactured Materials - Membranes, Artificial
- Materials Testing
- Miniaturization - Nanotechnology
- Molecular Conformation
- Nanostructures
- Natural Science Disciplines - Nanotechnology
- Particle Size
- Surface Properties
- Thermodynamics - Hot Temperature
- Time Factors
has restriction
- closed
Date in CU Experts
- September 9, 2021 3:03 AM
Full Author List
- Szoszkiewicz R; Okada T; Jones SC; Li T-D; King WP; Marder SR; Riedo E
author count
- 7
citation count
- 155
published in
Other Profiles
International Standard Serial Number (ISSN)
- 1530-6984
Digital Object Identifier (DOI)
Additional Document Info
start page
- 1064
end page
- 1069
volume
- 7
issue
- 4