High-speed, sub-15 nm feature size thermochemical nanolithography Journal Article uri icon

Overview

publication date

  • April 1, 2007

has restriction

  • closed

Date in CU Experts

  • September 9, 2021 3:03 AM

Full Author List

  • Szoszkiewicz R; Okada T; Jones SC; Li T-D; King WP; Marder SR; Riedo E

author count

  • 7

citation count

  • 152

Other Profiles

International Standard Serial Number (ISSN)

  • 1530-6984

Additional Document Info

start page

  • 1064

end page

  • 1069

volume

  • 7

issue

  • 4