Quartz Crystal Microbalance Studies of Al2O3 Atomic Layer Deposition Using Trimethylaluminum and Water at 125 degrees C Journal Article uri icon

Overview

publication date

  • January 28, 2010

has subject area

Date in CU Experts

  • September 6, 2013 4:38 AM

Full Author List

  • Wind RA; George SM

author count

  • 2

citation count

  • 65

Other Profiles

International Standard Serial Number (ISSN)

  • 1089-5639

Additional Document Info

start page

  • 1281

end page

  • 1289

volume

  • 114

issue

  • 3