Quartz Crystal Microbalance Studies of Al2O3 Atomic Layer Deposition Using Trimethylaluminum and Water at 125 degrees C Journal Article uri icon

Overview

publication date

  • January 28, 2010

Full Author List

  • Wind RA; George SM

Other Profiles

Additional Document Info

start page

  • 1281

end page

  • 1289

volume

  • 114

issue

  • 3